Stocker utilization self-balancing system and method

Details Stocker utilization self-balancing system and method Stocker utilization self-balancing system and method

2006-08-29

2006-08-29

Tran, Khoi H. (Department: 3651)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

C700S112000, C700S213000, C414S806000, C414S940000

Reexamination Certificate

active

07099739

ABSTRACT:
A method for operating a plurality of stockers, comprises the steps of: monitoring utilization of the plurality of stockers, each stocker capable of storing a plurality of wafer, LCD or reticle containers; and automatically transferring a first wafer, LCD or reticle container from a first one of the stockers to a second one of the stockers if the utilization of the first stocker is greater than a predetermined thereshold.

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patent: 6854583 (2005-02-01), Horn

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