Stock unit for storing carriers

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means

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Details

981153, 211 41, 211163, 414283, 414787, B65G 1133

Patent

active

049867156

ABSTRACT:
A stock unit for carriers includes a stocker having shelves, for storing carriers containing semiconductor wafers, a mounting port on which the carriers are temporarily mounted, and a handler for transporting the carriers between the shelf and the mounting port.

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