Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent
1989-10-17
1991-01-22
Bucci, David A.
Material or article handling
Movable rack having superposed, charge-supporting elements,...
Rack moved vertically by elevating means
981153, 211 41, 211163, 414283, 414787, B65G 1133
Patent
active
049867156
ABSTRACT:
A stock unit for carriers includes a stocker having shelves, for storing carriers containing semiconductor wafers, a mounting port on which the carriers are temporarily mounted, and a handler for transporting the carriers between the shelf and the mounting port.
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Bucci David A.
Tokyo Electron Limited
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