Stick-on-mask for use with coulometric measuring instruments

Details Stick-on-mask for use with coulometric measuring instruments Stick-on-mask for use with coulometric measuring instruments

1983-11-21

1985-12-24

Tung, T.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204 1T, 204279, 204400, 20412965, G01N 2746

Patent

active

045604649

ABSTRACT:
A mask for precisely defining the area of a thin metal layer on a substrate to be deplated during measurement of the thickness of the thin metal layer utilizing a coulometric technique. The mask having an adhesive on one side for securing the mask to the thin metal layer and for preventing the leakage of electrolyte between the mask and the thin metal layer.

REFERENCES:
patent: 2319196 (1943-05-01), Anderson et al.
patent: 2457234 (1948-12-01), Herbert et al.
patent: 3012958 (1961-12-01), Vixler
patent: 3139394 (1964-06-01), Oelgoetz
patent: 3410772 (1968-11-01), Geld et al.
patent: 3467592 (1969-09-01), Eisberg et al.
patent: 4274418 (1981-06-01), Vesterager et al.
patent: 4310389 (1982-01-01), Harbulak

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