Stepper or scanner having two energy monitors for a laser

Details Stepper or scanner having two energy monitors for a laser Stepper or scanner having two energy monitors for a laser

1997-08-08

2000-10-31

Adams, Russell

Photocopying

Projection printing and copying cameras

Step and repeat

355 68, 430 30, 2504921, G03B 2742, G03B 2774, G03C 500, G21G 500

Patent

active

061410810

ABSTRACT:
A first laser light intensity detector is positioned within a stepper or scanner proximate to a reticle so that attenuation due to stepper optics has already occurred prior to the laser light impinging upon the light intensity detector. Preferably, the first light intensity detector is mounted as closed to the wafer as practical. A second light intensity detector is located at the output of the laser. The light intensity detected from the outputs of the first and second light intensity detectors, in conjunction, forms part of a feedback mechanism which adjusts the light output of the laser, during wafer fabrication, so that the light intensity detected by the first light intensity detector is an optimum value.

REFERENCES:
patent: 4641071 (1987-02-01), Tazawa et al.
patent: 5463650 (1995-10-01), Ito et al.
patent: 5526093 (1996-06-01), Takahashi
patent: 5657334 (1997-08-01), Das et al.
patent: 5659383 (1997-08-01), Ozawa
patent: 5721608 (1998-02-01), Taniguchi
patent: 5726739 (1998-03-01), Hayata
patent: 5728495 (1998-03-01), Ozawa
Kazuaki Suzuki et al., "Dosage Control For Scanning Exposure with Pulsed Energy Fluctuation and Exposed Position Jitter," Jpn. J. Appl. Phys., vol. 34 (1995), pp. 6565-6572.
G. de Zwart et al., "Performance of A Step And Scan System For DUV Lithography," SPIE Symposium on Optical Microlithography, Santa Clara, Mar. 1997, pp. 1-19.

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