Stepper light control using movable blades

Details Stepper light control using movable blades Stepper light control using movable blades

1995-10-20

1997-10-07

Moses, R. L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 67, 355 53, 355 54, 355 34, 355 35, G03B 2772, G03B 2752, G03B 2754

Patent

active

056754027

ABSTRACT:
The present invention discloses a light control means in a stepper.
The light control means of the present invention has a twofold structure consisted of at least more than two blades which open a circuit pattern designed on a reticle; and a subblade which can close selectively a portion of the circuit pattern. The sub-blade is mounted above or below one of the at least more than two blades, and is movable in every directions in response to the instruction from the blade control system.
Accordingly, the present invention provides a exposure process which can selectively cover only the dies that will be overlapped with the EBR gap of the wafer using sub-blade, thereby increasing the number of the net-die.

REFERENCES:
patent: 4702592 (1987-10-01), Geiger et al.

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