Step and repeat imprint lithography processes

Details Step and repeat imprint lithography processes Step and repeat imprint lithography processes

2005-05-11

2010-06-01

Tentoni, Leo B (Department: 1791)

Plastic and nonmetallic article shaping or treating: processes

Direct application of electrical or wave energy to work

Polymerizing, cross-linking, or curing

C264S040100, C264S319000

Reexamination Certificate

active

07727453

ABSTRACT:
The present invention is directed to a method of forming a layer on a region of a substrate, the method including, inter alia, positioning a liquid on the substrate; and contacting the liquid with the mold, defining a gap between the mold and the substrate, with the gap enabling positioning of the liquid by capillary forces to generate the layer over the region.

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