Step and repeat exposure apparatus and method

Details Step and repeat exposure apparatus and method Step and repeat exposure apparatus and method

1986-04-18

1987-06-02

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 54, 355 95, G03B 2742

Patent

active

046698680

ABSTRACT:
An apparatus and method for exposing a film of radiation sensitive material overlying a substrate to a pattern of radiation utilizes proximity focusing of a mask pattern onto the film and step and repeat techniques for exposing the entire area of the film to be exposed. The apparatus includes a source of radiation, a substrate holder supporting the substrate with the film of radiation sensitive material thereon in the path of the radiation, and a mask holder for supporting the mask intermediate the radiation source and the film in close proximity thereto for proximity focusing the mask pattern onto the film. A stepping means incrementally moves the mask relative to the substrate to permit exposure of the film area.

REFERENCES:
patent: 4047813 (1977-09-01), Spence-Bate
patent: 4084903 (1978-04-01), Pircher
patent: 4362385 (1982-12-01), Lobach
patent: 4540277 (1985-09-01), Mayer et al.

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