Step and repeat apparatus

Details Step and repeat apparatus Step and repeat apparatus

1985-06-21

1987-09-22

McIntosh, John P.

Coating apparatus

Work holders, or handling devices

269 56, B05C 1302

Patent

active

046947760

ABSTRACT:
Step and repeat apparatus used for performance operations upon a generally planar component such as a microprocessor wafer comprises a support for a workpiece, the support being attached by means of an arm to a mechanism adapted to move the support in two dimensions, the arm being pivotally secured to said mechanism at a location remote from the support and lifting means arranged to move the support about the pivot in a plane perpendicular to said two dimensions.

REFERENCES:
patent: 3143791 (1964-08-01), Lanahan et al.
patent: 4485387 (1984-11-01), Drumheller

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