Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1987-08-18
1994-03-29
Niebling, John
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
20429841, C23C 1422
Patent
active
052981363
ABSTRACT:
A process and apparatus for controlled arc coating of substrates utilizing relatively thick cathodes or targets for obtaining coatings which are free of macro-particles. The thick targets are capable of use by controlling and steering the arc in a desired path as necessary to produce coatings of the desired compositions using magnetic fields generated to provide arc path control and modulation for efficient cathode utilization.
REFERENCES:
patent: 3628948 (1971-12-01), Bruning
patent: 3689740 (1972-09-01), De Corso et al.
patent: 3878085 (1975-04-01), Corbani
patent: 3956093 (1976-05-01), McLeod
patent: 4219722 (1980-08-01), Rudd et al.
patent: 4444635 (1984-04-01), Kobayashi et al.
patent: 4563262 (1986-01-01), Sablev et al.
patent: 4673477 (1987-06-01), Ramalingam et al.
patent: 4724058 (1988-02-01), Morrison, Jr.
John L. Vossen et al, Thin Film Processes, Academic Press, New York, 1978, pp. 76-83, 131-163.
Brian Chapman, Glow Discharge Processes, John Wiley & Sons, New York, 1990, pp. 260-271.
Pulsed Metallic-Plasma Generators by Alexander S. Gilmour, Jr. et al., Proceedings of the IEEE, vol. 60, No. 8, Aug. 1972.
Front page of PCT International Publication No. WO 85/03954 (International Application No. PCT/US85/00312, filed Feb. 27, 1985).
Drawings from U.S. Patent Application Serial No. 06/848,720, filed Apr. 4, 1986 (pending in Group Art Unit 112).
Vacuum Erosion-Type Generators and Plasma Accelerators Working On Alternating Current, Plenum Publishing Corporation, Document 0018-151X/80/1805, pp. 0821-0830, 1981 (translated from Teplofizika Vysokikh Temperatur, vol. 18, No. 5, Sep.-Oct. 1980. N. E. Bauman Moscow Higher Technical School).
Leader William T.
Niebling John
Regents of the University of Minnesota
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