Steam oxidation apparatus

Details Steam oxidation apparatus Steam oxidation apparatus

2003-12-26

2008-10-21

Griffin, Walter D. (Department: 1797)

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including heat exchanger for reaction chamber or reactants...

C118S715000, C118S724000

Reexamination Certificate

active

07438872

ABSTRACT:
A steam oxidation apparatus is provided which is capable of ensuring a desirable controllability and reproducibility of the steam oxidation of an object-to-be-oxidized housed in the reactor, by suppressing condensation of the steam in the steam-accompanied inert gas supplied to the reactor.The steam oxidation apparatus78is an apparatus used for forming the current confinement structure into the surface-emitting laser element by subjecting the high-Al-content layer to steam oxidation, and is equipped with a reactor42for the steam oxidation, a steam-accompanied inert gas system for supplying a steam-accompanied inert gas to the reactor42, an inert gas system for supplying an inert gas to the reactor42, a reactor bypass pipe52for allowing the steam-accompanied inert gas system and inert gas system to bypass the reactor, and an exhaust system for discharging exhaust gas from the reactor42. The steam oxidation apparatus78is further equipped with a thermostatic oven72which houses the H2O bubbler60, second gas pipe68, automatic open/close valves66A to66D, a portion of the third gas pipe70in the vicinity of the automatic open/close valves66A to66D, and a portion of the gas inlet port42A side of the reactor42.

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Japanese Office Action: Application No.: 2003-014260; Dated: Apr. 3, 2007.

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