Cleaning and liquid contact with solids – Apparatus – For work having hollows or passages
Reexamination Certificate
2006-09-19
2006-09-19
Stinson, Frankie L. (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
For work having hollows or passages
C134S16900A, C134S16900A
Reexamination Certificate
active
07108002
ABSTRACT:
Disclosed are systems and methods for removing stubborn contaminants, aluminum fluoride and aluminum chloride in particular, from components of semiconductor-processing equipment. One embodiment forces steam through small holes in a gas distribution plate to remove build up on the interior walls of the holes. A cleaning fixture disposed between the steam source and the gas distribution plate delivers the steam at increased pressures. The gas distribution plate can be immersed in water during cleaning to capture the exiting steam.
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Macura Kurtis R.
Zuck David S.
Behiel Arthur J.
Quantum Global Technologies, LLC.
Silicon Edge Law Group LLP
Stinson Frankie L.
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