Statistical method for identifying microcracks in insulators

Details Statistical method for identifying microcracks in insulators Statistical method for identifying microcracks in insulators

2007-06-05

2007-06-05

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

By loading of specimen

C073S762000, C073S826000, C073S852000

Reexamination Certificate

active

11145673

ABSTRACT:
One embodiment of the invention is a method for evaluating a material such as low-k dielectric, by a stress-generating test tool such as a needle. The evaluation object is shaped as a stack of adhering layers: low-k dielectric, first metal (preferably copper), barrier metal (preferably tantalum nitride), and second metal (preferably aluminum). A numerical correlation is established between a cracking in the barrier metal layer caused by probing and a damage in the layer of insulating material-to-be-tested.A predetermined number of locations of the top metal layer is selected for the probing step comprising touch-down, applying force, and lifting is repeated so that the number of repeats provide a pre-determined statistical confidence level.The top metal layer is then removed by a chemical etch solution so that the etch solution also penetrates into any stress-created cracks of the barrier metal layer underneath the imprints, and further dissolves a portion of the first metal layer, generating cavities in the first metal layer. The occurrence of all first metal cavities is recorded and correlated with the probing.

REFERENCES:
patent: 3710616 (1973-01-01), Smith et al.
patent: 3803485 (1974-04-01), Crites et al.
patent: 4400618 (1983-08-01), Bupp et al.
patent: 4484132 (1984-11-01), Crites
patent: 4531400 (1985-07-01), Nevel
patent: 4774188 (1988-09-01), Chandross
patent: 4864867 (1989-09-01), Manahan, Sr.
patent: 5005423 (1991-04-01), Poormon
patent: 5165287 (1992-11-01), Manahan, Sr.
patent: 6840083 (2005-01-01), Hijikata
patent: 7080561 (2006-07-01), Bohlmann et al.

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