Optical: systems and elements – Having significant infrared or ultraviolet property – Having polarizing element
Reexamination Certificate
2007-05-22
2007-05-22
Shafer, Ricky D. (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Having polarizing element
C359S486010, C359S490020, C355S071000
Reexamination Certificate
active
11106480
ABSTRACT:
A radial transverse electric polarizer device is provided. The device includes a first layer of material having a first refractive index, a second layer of material having a second refractive index, and a plurality of elongated elements azimuthally and periodically spaced apart, and disposed between the first layer and the second layer. The plurality of elongated elements interact with electromagnetic waves of radiation to transmit transverse electric polarization of electromagnetic waves of radiation. One aspect of the invention is, for example, to use such polarizer device in a lithographic projection apparatus to increase imaging resolution. Another aspect is to provide a device manufacturing method including polarizing a beam of radiation in a transverse electric polarization.
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Cummings Kevin
Flagello Donis
Straaijer Alexander
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Shafer Ricky D.
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