Measuring and testing – Fluid pressure gauge – With pressure and/or temperature compensation
Patent
1993-07-20
1995-10-17
Noland, Thomas P.
Measuring and testing
Fluid pressure gauge
With pressure and/or temperature compensation
73497, 73702, 7351433, G01D 304, G01L 1904
Patent
active
054580005
ABSTRACT:
A temperature and static pressure compensated differential pressure sensor includes a semiconductor substrate in which a flexible, pressure responsive diaphragm is formed. A pressure responsive resonant microbeam is fabricated at the diaphragm periphery. For temperature compensation, a secondary resonant microbeam sensor is fabricated on the substrate at a peripheral location beyond the point of substrate attachment to a pressure tube or other support. For static pressure compensation, another secondary resonant microbeam can be positioned remote from the diaphragm and at a location of maximum substrate response to static pressure. A further resonant microbeam can be mounted at the diaphragm center to augment the signal due to diaphragm deflections. Also disclosed is an accelerometer including a proof mass, a rigid rim surrounding the proof mass, and a series of narrow, flexible bridges supporting the proof mass relative to the rim. The bridges flex responsive to accelerations, thus to allow the proof mass to move relative to the rim. At least one of the bridges incorporates a resonant microbeam for measuring acceleration by virtue of the induced strain from flexure of its associated bridge. For temperature compensation, a secondary resonant microbeam is fabricated along the rim.
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"Construction and Performance Characteristics of Polysilicon Resonating Beam Force Transducers", by H. Guckel, et al, The Third Toyota Conference, Integrated Micro Motion Systems Micromachining, Control & Application, Nissin, Aichi, Japan, Oct. 22-25, 1989 5 pages.
Burns David W.
Zook J. David
Honeywell Inc.
Noland Thomas P.
Shudy Jr. John G.
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