Static pressure air surface stage

Details Static pressure air surface stage Static pressure air surface stage

1985-07-18

1987-03-10

Levy, Stuart S.

Bearings

Linear bearing

With temperature, electrical, or orthogonal feature

384 12, F16C 1726, F16C 3206

Patent

active

046487247

ABSTRACT:
A static pressure air surface stage which is adapted to control to the utmost the deflection of the movable guide caused by the reaction forces of the bearing to ensure the stable provision of the better stage run precision. The bearing pads of the movable guides are oppositely disposed by a pair on both side faces of the stationary guides.

REFERENCES:
patent: 3053583 (1962-09-01), Shaw
patent: 3417225 (1968-12-01), Christian
patent: 3439581 (1969-04-01), Wilkins
patent: 3582159 (1971-06-01), Uhtenwoldt
patent: 3583774 (1971-06-01), Degast
H. Kinoshita, T. Saito, M. Kanai, K. Miwa, and T. Deguchi, "XY Stage of Static Pressure Air Guiding Type", Sep. 5, 1980.

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