Static pressure air surface stage

Details Static pressure air surface stage Static pressure air surface stage

1985-07-18

1987-03-10

Levy, Stuart S.

Bearings

Linear bearing

With temperature, electrical, or orthogonal feature

384 12, F16C 1726, F16C 3206

Patent

active

046487239

ABSTRACT:
A static pressure air surface stage for precision locating use, which is built in precision working machines, precision measuring instruments, semiconductor manufacturing apparatuses. All the bearing pads which are used in arrangement by two are integrally constructed so as to simplify the assembly adjustment and stabilize, improve the assembling precision.

REFERENCES:
patent: 3484064 (1969-12-01), Koenig, III
patent: 3582159 (1971-06-01), Uhtenwoldt
patent: 4118101 (1978-10-01), Teramachi
patent: 4384859 (1983-05-01), Teramachi
patent: 4417770 (1983-11-01), Tucker
M. Kanai, et al., "Mechanism for Determining a Fine Position of a Static Pressure Air Float Stage", Mar. 5, 1982.

Affiliated with

Also associated with

Rating

Static pressure air surface stage does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Static pressure air surface stage, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Static pressure air surface stage will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1018889