Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent
1993-07-16
1995-01-24
Coe, Philip R.
Cleaning and liquid contact with solids
Apparatus
With movable means to cause fluid motion
134 1, 134902, B08B 312
Patent
active
053834844
ABSTRACT:
A static megasonic cleaning system for cleaning multiple objects having an exterior surface includes a cassetteless vessel having an internal cavity for receiving the multiple objects and an array of megasonic transducers mounted on the vessel. Each transducer emits a focused beam of megasonic energy into the cavity and is arranged so that the emitted beams from all of the transducers collectively envelop the entire exterior surface of the objects. The transducers are staggered to avoid internal mounting structure within the vessel and avoid unnecessary dissipation of the megasonic energy.
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Carolin Roger A.
Erhardt Heinrich S.
McConnell Christopher F.
Thomas Huw K.
CFMT, Inc.
Coe Philip R.
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