Static interferometric ellipsometer

Details Static interferometric ellipsometer Static interferometric ellipsometer

1986-04-10

1988-08-09

Willis, Davis L.

Optics: measuring and testing

By particle light scattering

With photocell detection

356351, 356357, G01B 902

Patent

active

047624140

ABSTRACT:
A static interferometric ellipsometer, wherein a source (3) generates a coherent light-beam with two monochromatic radiations at slightly different frequencies. A first photodetector (6) generates a first beat between the two radiations, to be used as reference. A second photodetector (9) generates a second beat between the two radiations, after they have been polarized in perpendicular planes and separated so that one of them is reflected onto the photodetector (9) by the sample under test (1,2). A measuring and computing system (11) determines the optical properties of said sample starting from the intensity of the second beat and from the relative phase between the two beats.

REFERENCES:
patent: 4053232 (1977-10-01), Dill et al.
patent: 4553841 (1985-11-01), Coppa et al.
Levites et al., "A Heterodyne Laser Interferometer with an Acousto-Optical Modulator", Moscow Machine-Toll Institute, Nov.-Dec. 1973, No. 6, pp. 139-140.
Analysis of Thin Films by Interferometric Ellipsometry by H. F. Hazebroek, A. A. Holscher, Japanese Journal of Applied Physics, suppl. 2, pt. 1, pp. 673-676, 1974, Japanese Journal of Applied Physics, Tokyo 105, Japan
Interference Ellipsometer by D. P. Pilipko and I. P. Pugach, 8164 Instruments and Experimental Techniques, pp. 951-952, 26 (1983), Jul.-Aug., No. 4, Part 2, New York, NY.
R. M. A. Azzam and N. M. Bashara, article "Interferometric Ellipsometers"--Ellipsometry and Polarized LIght--North-Holland Publishing Co.--1977
F. Hazebroek and W. M. Visser, "Automated Laser Interferometric Ellipsometry and Precision Reflectometry"--1983--Journal of Physics.

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