Cleaning and liquid contact with solids – Processes – Combined
Reexamination Certificate
2005-03-29
2005-03-29
Markoff, Alexander (Department: 1746)
Cleaning and liquid contact with solids
Processes
Combined
C134S010000, C134S034000, C134S05600D, C134S113000, C134S902000
Reexamination Certificate
active
06872262
ABSTRACT:
A new method and apparatus is provided that assures constant fluid flow of the fluid that is entered into a semiconductor device processing tank or container. A flow meter is set to a particular flow rate; the fluid that comes from the POU is routed through the flow meter. The fluid passes through a flow meter into a processing tank. The fluid is allowed to fill the container up to an overflow point of the container. An overflow basin is provided into which the overflowing fluid is routed from where the fluid is drained into a fluid reclaim vessel. The overflow is detected by a sensor, the sensor activates an overflow relieve valve that is mounted in the bottom of the container. The overflow relieve valve is opened and drains fluid from the container thus counteracting the overflow of the fluid into the overflow basin. The interaction between the overflow detector and the overflow relieve valve assures a constant rate of supply of the fluid to the processing tank or container.
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Cheng Teh Guat
Chong Kam Beng
Heng Chua Kien
Khee Chin Choon
Chartered Semiconductor Manufacturing Ltd.
Markoff Alexander
Pike Rosemary L. S.
Saile George O.
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