Starting product for the production of a read-only memory and a

Details Starting product for the production of a read-only memory and a Starting product for the production of a read-only memory and a

1976-05-03

1977-08-30

Tufariello, T. M.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

2041293, 20412965, C25F 300, C25F 314

Patent

active

040453103

ABSTRACT:
A read-only memory is manufactured from a matrix or array of multilayer electrical devices, each of which includes at least one metallic layer, a portion of which contacts a doped semi conductor region. The metallic layers are controllably and rapidly thinned down and decreased in cross-sectional area in the vicinity of the doped regions to form fusible links, thus producing a ROM starting product. Fusible link formation is enhanced by the use of an etchant for the metallic layer which forms an electrochemical cell in conjunction therewith and with the semiconductor and the doped region. Any metallic layers not contacting a doped region are also etched by the etchant, but at the much slower "chemical rate". Following the production of the starting product, a ROM may be produced by the selective application of voltages to selected fusible links, the I.sup.2 R heating of the links fusing them, or blowing them out. In a preferred embodiment, the electrical devices are MOSFETS.

REFERENCES:
patent: 3245051 (1966-04-01), Robb
patent: 3529299 (1970-09-01), Chung et al.
patent: 3678348 (1972-07-01), Reber et al.
patent: 3691654 (1972-09-01), Siegel
patent: 3695955 (1972-10-01), Jochems et al.

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