Starting powders for ITO production, ITO sinters and processes f

Stock material or miscellaneous articles – Composite – Of inorganic material

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428699, 428701, 428702, 252518, 2525201, C01G 1900

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active

060999829

ABSTRACT:
The starting salts for ITO production, precipitant and the conditions for reaction, calcination, etc. are specified such as to synthesize a starting oxide adapted to be free from volatile components such as halides and lower oxides; the starting oxide is dispersed to particles having a specified flowability; the powder is pressed into a compact, which is sintered in either air atmosphere or an oxygen-rich atmosphere to produce a large and high-density sinter for use as an ITO sputtering target.

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patent: 5435826 (1995-07-01), Sakakibara et al.
patent: 5480532 (1996-01-01), Schlott et al.
patent: 5580496 (1996-12-01), Yulinobu et al.
patent: 5700418 (1997-12-01), Hormann et al.
patent: 5866493 (1999-02-01), Lee et al.
J. Lambert Bates, Curtis W.Griffin, David D. Marchant and John E. Garnier, "Electrical Conductivity, Seebeck Coefficient, and Structure of In.sub.2 O.sub.3 -SnO.sub.2 ", American Ceramic Society Bulletin, 65(4), 673-678(1986).

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