Starter for inductively coupled plasma tube

Details Starter for inductively coupled plasma tube Starter for inductively coupled plasma tube

1987-06-29

1988-08-23

Moore, David K.

Electric lamp and discharge devices: systems

Condenser in the supply circuit

Electric switch in the condenser circuit

315236, 31511151, 315226, 31323131, 219 1065, 219 1075, 21912152, B23K 500, B23K 900, H01J 724

Patent

active

047663510

ABSTRACT:
A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation.

REFERENCES:
patent: 3007030 (1961-10-01), Ducati
patent: 3138739 (1964-06-01), Farmer
patent: 3153175 (1964-10-01), Winzeler
patent: 3296410 (1967-01-01), Hedger
patent: 3311775 (1967-03-01), Solow
patent: 3407281 (1968-10-01), Greene et al.
patent: 4080549 (1978-03-01), Creedon et al.
patent: 4431901 (1984-02-01), Hull
patent: 4549065 (1985-10-01), Camacho et al.
patent: 4612477 (1986-09-01), Dothan

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