Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
Reexamination Certificate
2008-09-09
2008-09-09
Pezzuto, Helen L. (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Polymers from only ethylenic monomers or processes of...
C526S204000, C526S222000, C526S262000, C526S268000, C526S270000, C526S271000, C526S281000, C526S284000, C526S319000
Reexamination Certificate
active
11169790
ABSTRACT:
The present invention provides a star polymer which comprises a central core and three or more branches bonded to the central core, and has a weight average molecular weight of from 1,000 to 100,000, wherein at least one of the branches containing at least one repeating unit selected from the group consisting of the following repeating units (1), (2), (3), (4) and (9); and a process for producing the star polymer. The present invention also provides a chemically amplified positive resist composition comprising the star polymer and an acid generator.
REFERENCES:
patent: 2005-053996 (2005-03-01), None
patent: 2005-070742 (2005-03-01), None
Stenzel-Rosenbaum et al., Macromolecules, vol. 34, pp. 5433-5438, (2001).
Hovestad et al., Macromolecules, vol. 33, pp. 4048-4052, (2000).
Lee Young-joon
Miyagawa Takayuki
Watanabe Yasuhiro
Pezzuto Helen L.
Sumitomo Chemical Company Limited
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