Standard reference component for calibration, fabrication...

Details Standard reference component for calibration, fabrication... Standard reference component for calibration, fabrication...

2007-11-14

2009-11-03

Wells, Nikita (Department: 2881)

Radiant energy

Calibration or standardization methods

C250S311000, C250S310000, C250S306000, C250S307000, C250S3960ML, C250S398000, C257S429000

Reexamination Certificate

active

07612334

ABSTRACT:
The present invention provides a standard reference component for calibration for performing magnification calibration used in the scanning electron microscope with high precision, and provides a scanning electron microscope technique using it. Provided is a standard reference component for calibration for calibrating a scanning electron microscope that measures a length of a pattern in an observation area from information on the intensity of secondary electrons or reflected electrons generated by scanning an incident electron beam in the observation area on a measuring sample, having: a first substrate on which a multiple-layer is laminated and a second substrate with a recess for holding the first substrate, wherein the first substrate is held in the recess of the second substrate so that a normal direction of the multiple-layer surface may be roughly perpendicular to a normal direction of the second substrate surface, and the multiple-layer has a multiple-layer structure of a film containing silicon and a film containing molybdenum.

REFERENCES:
patent: 5557105 (1996-09-01), Honjo et al.
patent: 2002/0130262 (2002-09-01), Nakasuji et al.
patent: 2008/0210867 (2008-09-01), Hitomi et al.
patent: 2008/0251868 (2008-10-01), Nakayama et al.
Misumi et al. “2006 The Japan Society of Precision Engineering (JSPE) Spring Meeting, Technical Digest,” pp. 1091.

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