Standard mechanical interface wafer pod gas filling system

Details Standard mechanical interface wafer pod gas filling system Standard mechanical interface wafer pod gas filling system

1999-12-22

2000-10-24

Douglas, Steven O.

Fluent material handling, with receiver or receiver coacting mea

Combined

141 91, 141 93, 141 95, 414217, 41433101, 41433104, 414939, 414937, 414940, B65B 104

Patent

active

061351687

ABSTRACT:
A standard mechanical interface wafer pod gas filling system, comprising: a platform, carrying a wafer pod cover of a wafer pod; a pod hold-down latch mechanism; a port, carrying a wafer pod base, with lateral gaps between the platform and the port; a pod door lock/unlock mechanism, mounted on the lower side of the platform; a port door up/down mechanism; several nozzles, mounted on one lateral side of the platform, having widening ends, wherein the lateral gap located opposite to the nozzles is wider than the other lateral gaps; a charging box, mounted on the lower side of the platform; and a gas supply unit for supplying inert gas through the nozzles and taking out air from the wafer pod.

REFERENCES:
patent: 5586585 (1996-12-01), Bonora et al.
patent: 5806574 (1998-09-01), Yamashita et al.

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