Stamper, manufacturing method therefor and optical device...

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Reexamination Certificate

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C428S064400, C430S270110, C216S041000

Reexamination Certificate

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06899936

ABSTRACT:
A fine pattern of an optical device formed by the Photo-Polymer method has a groove100,a side wall100aof which is sloped against a surface of stamper18.The slope angle θ of the side wall100asatisfies the following relational expression: Tan−1(4×h×w1−0.2)<θ<80° where h: a depth of the groove100;and w1: a width of a top of a projected portion formed by the side walls100a. Burrs formed in the optical device are reduced, and thereby mass productivity of the optical device is improved.

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patent: 2000-246810 (2000-09-01), None

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