Stamp having an antisticking layer and a method of forming...

Details Stamp having an antisticking layer and a method of forming... Stamp having an antisticking layer and a method of forming...

2006-11-21

2006-11-21

Hirshfeld, Andrew H. (Department: 2854)

Printing

Printing members

C101S401000, C101S401100

Reexamination Certificate

active

07137336

ABSTRACT:
A stamp for use in transferring a pattern in nano-scale has a monomolecular antisticking layer. The anti-sticking layer comprises molecular chains, which are covalently bound to the surface of the stamp and which each comprise at least one fluorine-containing group. Each molecular chain contains a group Q, which comprises a bond which is weaker than the other bonds in the molecular chain as well as the covalent bond that binds the molecular chain to the surface of the stamp. Splitting of said bond in the group Q creates a group Q1, which is attached to the part of the molecular chain being left on the surface of the stamp and which is capable of reacting with a fluorine-containing compound to restore the antisticking layer. In a method of manufacturing a stamp for use in transferring a pattern in nanoscale, the stamp is provided with the above-mentioned molecular chain. In a method of repairing a damaged antisticking layer of the above-mentioned stamp, the stamp is treated with a repairing reagent, which has a coupling end, which is capable of reacting with the group Q1, and a fluorine-containing group located at the other end of the repairing reagent.

REFERENCES:
patent: 5512131 (1996-04-01), Kumar et al.
patent: 6027595 (2000-02-01), Suleski
patent: 6923930 (2005-08-01), Ling et al.
patent: 0244884 (2003-12-01), None
patent: WO2004/000567 (1987-11-01), None
patent: 0000868 (2000-01-01), None
patent: 0054107 (2000-09-01), None

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