Stalagraphy

Details Stalagraphy Stalagraphy

1994-12-16

1996-10-01

Kunemund, Robert

Fishing, trapping, and vermin destroying

437132, 437133, 437233, H01L 2120

Patent

active

055610790

ABSTRACT:
A method of lithography is disclosed for making very small structures (10.sup.-6 m and smaller) on a surface such as in the manufacture of semiconductor devices. Many micron-sized or smaller droplets of a suitable material are formed on the surface, and the droplets are used for forming structures on or holes in the surface and thus are the basis for the shape and location of the structures.

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