Staging apparatus and method, and method for manufacturing the s

Details Staging apparatus and method, and method for manufacturing the s Staging apparatus and method, and method for manufacturing the s

1998-07-27

1999-11-16

Fulton, Christopher W.

Geometrical instruments

Gauge

Work support adjustment

33573, 33 1M, G01B 5004

Patent

active

059835133

ABSTRACT:
A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information. A method for manufacturing a staging apparatus and a method for controlling movement of a stage are also provided.

REFERENCES:
patent: 4525659 (1985-06-01), Imahashi et al.
patent: 4821205 (1989-04-01), Schutten et al.
patent: 4941265 (1990-07-01), Heiland
patent: 5030901 (1991-07-01), Futami
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5251863 (1993-10-01), Gossman et al.
patent: 5502899 (1996-04-01), Yamaguchi et al.

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