Stage unit, drive table, and scanning exposure apparatus using t

Details Stage unit, drive table, and scanning exposure apparatus using t Stage unit, drive table, and scanning exposure apparatus using t

1999-01-08

2000-09-26

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, 355 72, G03B 2742, G03B 2772, G03B 2758

Patent

active

061249238

ABSTRACT:
It is an object of the present invention to reduce the weight of a stage unit and suppress heat generation of the driving unit of the stage, thereby improving the surface accuracy of the stage or measurement precision of an interferometer for measuring the position of the stage. A reticle base, a scanning stage mounted on the reticle stage and moved in the scanning direction, and a fine adjustment stage mounted on the scanning stage and capable of being finely moved in the X and Y directions and in the rotational direction are provided as a reticle stage. A first electromagnetic actuator for performing driving in the scanning direction, and a second electromagnetic actuator, having a smaller thrust than that of the first electromagnetic actuator, for performing driving in a direction perpendicular to the scanning direction are provided as the driving unit of the fine adjustment stage.

REFERENCES:
patent: 4803712 (1989-02-01), Kembo et al.
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patent: 4952858 (1990-08-01), Galburt
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patent: 5260580 (1993-11-01), Itoh et al.
patent: 5359389 (1994-10-01), Isohata
patent: 5477304 (1995-12-01), Nishi
patent: 5620814 (1997-04-01), Kley
patent: 5767948 (1998-06-01), Loopstra et al.
patent: 5850280 (1998-12-01), Ohtomo et al.

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