Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-09-23
1998-12-15
Lee, Shuk
Photocopying
Projection printing and copying cameras
Step and repeat
355 71, 355 72, G03B 2742, G03B 2772, G03B 2758
Patent
active
058502807
ABSTRACT:
It is an object of the present invention to reduce the weight of a stage unit and suppress heat generation of the driving unit of the stage, thereby improving the surface accuracy of the stage or measurement precision of an interferometer for measuring the position of the stage. A reticle base, a scanning stage mounted on the reticle stage and moved in the scanning direction, and a fine adjustment stage mounted on the scanning stage and capable of being finely moved in the X and Y directions and in the rotational direction are provided as a reticle stage. A first electromagnetic actuator for performing driving in the scanning direction, and a second electromagnetic actuator, having a smaller thrust than that of the first electromagnetic actuator, for performing driving in a direction perpendicular to the scanning direction are provided as the driving unit of the fine adjustment stage.
REFERENCES:
patent: 4916340 (1990-04-01), Negishi
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5477304 (1995-12-01), Nishi
Horikawa Hiroto
Ohtomo Toshiya
Lee Shuk
Nikon Corporation
Virmani Shival
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