Stage system, exposure apparatus, and device manufacturing...

Details Stage system, exposure apparatus, and device manufacturing... Stage system, exposure apparatus, and device manufacturing...

2006-01-24

2006-01-24

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000, C310S012060

Reexamination Certificate

active

06989888

ABSTRACT:
A stage system that can meet enlargement of a stroke and thus, particularly, that can be suitably incorporated into an electron beam exposure apparatus. The stage system includes an X driving member (3) being movable along an X direction, a Y driving member (2) being movable along a Y direction, an X-Y movable member being movable in the Y direction relative to the X driving member, through a Y lateral static-pressure bearing (44), and also being movable in the X direction relative to the Y driving member through an X lateral static-pressure bearing, wherein a fluid discharged from the X lateral static-pressure bearing is combined with a fluid discharged from the Y lateral static-pressure bearing, and wherein the combined fluid is discharged from a discharging bore (53″) formed in the X driving member.

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patent: 9-330867 (1997-12-01), None

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