Stage system and lithographic apparatus comprising such a...

Details Stage system and lithographic apparatus comprising such a... Stage system and lithographic apparatus comprising such a...

2008-05-29

2010-06-22

Mathews, Alan A (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000

Reexamination Certificate

active

07742149

ABSTRACT:
A stage system for a lithographic apparatus includes a stage, an over-determined number of actuators arranged to act on the stage, and an electric power supply configured to provide a current to the actuators, wherein the current is supplied to a coil associated with a first actuator of the actuators and to a coil associated with a second actuator of the actuators.

REFERENCES:
patent: 2003/0098961 (2003-05-01), Iwamoto
patent: 2006/0072098 (2006-04-01), Dams
U.S. Appl. No. 11/712,555, filed Mar. 1, 2007, Kamidi et al.

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