Stage movement control apparatus and method therefor and project

Details Stage movement control apparatus and method therefor and project Stage movement control apparatus and method therefor and project

1995-11-22

1997-05-27

Gonzalez, Frank

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356399, 250548, G01B 1100

Patent

active

056337205

ABSTRACT:
When a stage moves, the position of the stage is detected by an interferometer, and a control unit controls the position of the stage while monitoring the output of the interferometer. Thus, the control unit effects positioning of the stage. In addition, the control unit calculates the square root of an arithmetic mean of the square of an error between target and present positions of the stage on the basis of the output of the interferometer, and estimates an amount of vibration of the stage on the basis of the result of the calculation, thereby enabling vibration characteristics to be quantitatively evaluated to a certain extent when the damping of vibration is rapid immediately after positioning, or when the damping is gentle or almost zero.

REFERENCES:
patent: 4757207 (1988-07-01), Chappelow et al.
patent: 4929083 (1990-05-01), Bruner

Affiliated with

Also associated with

Rating

Stage movement control apparatus and method therefor and project does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage movement control apparatus and method therefor and project, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage movement control apparatus and method therefor and project will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2332725