Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1998-03-12
2000-10-03
Adams, Russell
Photocopying
Projection printing and copying cameras
Step and repeat
355 72, 355 75, G03B 2742, G03B 2758, G03B 2762
Patent
active
061280690
ABSTRACT:
A stage mechanism includes a first stage being movable in a first direction and along a base table, a second stage being movable in a second direction, intersecting the first direction, and along the base table, while being guided by a guide provided on the first stage, first and second fluid static pressure applying devices for supporting, with fluid, the first and second stages, respectively, upon the base table, and first and second preloading magnet units provided on the first and second stages, respectively, for attracting the first and second stages toward the base table, respectively. At least one of the first and second preloading magnet units includes a plurality of rectangular magnet pieces.
REFERENCES:
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5194893 (1993-03-01), Nishi
patent: 5281996 (1994-01-01), Bruning et al.
patent: 5467720 (1995-11-01), Korenaga et al.
patent: 5518550 (1996-05-01), Korenaga et al.
patent: 5610686 (1997-03-01), Osanai
patent: 5684856 (1997-11-01), Itoh et al.
patent: 5760564 (1998-06-01), Novak
patent: 5781277 (1998-07-01), Iwanmoto
patent: 5822043 (1998-10-01), Ebinuma
patent: 5839324 (1998-11-01), Hara
patent: 5841250 (1998-11-01), Korenage et al.
patent: 5858587 (1999-01-01), Yamane et al.
Adams Russell
Canon Kabushiki Kaisha
Nguyen Henry Hung
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