Stage driving exposure apparatus wherein the number of driving d

Details Stage driving exposure apparatus wherein the number of driving d Stage driving exposure apparatus wherein the number of driving d

1997-09-22

1999-03-16

Moses, R. L.

Photocopying

Projection printing and copying cameras

Step and repeat

318575, G03B 2742, G05B 1933

Patent

active

058837027

ABSTRACT:
When the position of a stage is detected by interferometers, a converting means converts information detected by the interferometers into information on a position and a velocity of a center of gravity of the stage concerning each of degrees of freedom. PI controllers provided for each of the degrees of freedom determine control amounts for each of the degrees of freedom necessary for movement of the center of gravity by means of (proportional+integral) operation on the basis of velocity deviations in respective directions obtained as differences between values obtained by conversion into velocities from positional deviations of the center of gravity in the .theta., Y, X directions and velocities of the center of gravity in the respective directions. Outputs of the respective controllers are inputted into a converting means which converts the input into control amounts to be generated in motors 12, 14, 16, 18 respectively, and give the control amounts after the conversion as command values to the respective motors. Mutual interference between control means is effectively avoided when the stage is driven by using driving devices of a number larger than the degrees of freedom. The stage apparatus may be applied to an exposure apparatus.

REFERENCES:
patent: 4924257 (1990-05-01), Jain
patent: 4970448 (1990-11-01), Torii et al.
patent: 5004348 (1991-04-01), Magome
patent: 5202695 (1993-04-01), Hollandsworth
patent: 5227839 (1993-07-01), Allen
patent: 5477304 (1995-12-01), Nishi
patent: 5532565 (1996-07-01), Vervoordeldonk
patent: 5568032 (1996-10-01), Wakui
patent: 5581167 (1996-12-01), Kato et al.

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