Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1996-03-25
1997-09-02
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Step and repeat
355 77, 356 27, 356 285, 356399, 356401, H01L 2130, G03B 2742
Patent
active
056637837
ABSTRACT:
In a stage-drive controlling device used in a scanning projection exposure apparatus, a targeted speed Iwy is imparted to a speed control system for controlling the speed of a substrate stage, and a targeted speed Irc is concurrently imparted to a speed control system for controlling the speed of a mask stage such that the two stages assume a predetermined positional relationship. A deviation Xrc in the speed of the Speed control system is multiplied by 1/4 (multiplied by the magnification of projection) by a deviation feedback system, and the multiplied value is fed back as a targeted input to the speed control system. For this reason, the following formula holds: Ywy={Kwy/(s+Kwy)}.times.(Yrc/4). If the response of the speed control system side (substrate stage side) is good, even if the speed response of the speed control system side (mask stage side) is poor, the speed ratio between the two stages is kept at 4:1.
REFERENCES:
patent: 5473410 (1995-12-01), Nishi
patent: 5477304 (1995-12-01), Nishi
patent: 5506684 (1996-04-01), Ota et al.
patent: 5526093 (1996-06-01), Takahashi
patent: 5528027 (1996-06-01), Mizutani
Grimley Arthur T.
Kerner Herbert V.
Nikon Corporation
LandOfFree
Stage-drive controlling device, projection exposure apparatus in does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Stage-drive controlling device, projection exposure apparatus in, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage-drive controlling device, projection exposure apparatus in will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-312891