Stage device for an exposure apparatus and semiconductor device

Details Stage device for an exposure apparatus and semiconductor device Stage device for an exposure apparatus and semiconductor device

1994-06-21

2000-06-06

Berman, Jack

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

25044211, 25045311, 378 34, 378208, H01J 3720

Patent

active

060721839

ABSTRACT:
A pattern transfer system includes a stage device. The system includes a fine-motion driving device for moving a movable stage through a first range, a relatively rough-motion driving device for moving the movable stage through a second range, which has substantially the same extent as the first range, and a transfer device for transferring a pattern onto a substrate placed on the movable stage.

REFERENCES:
patent: 4325077 (1982-04-01), Dunham
patent: 4462580 (1984-07-01), Nielsen
patent: 4987526 (1991-01-01), Slocum et al.
patent: 5120034 (1992-06-01), Van Engelen et al.
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5684856 (1997-11-01), Itoh et al.

Affiliated with

Also associated with

Rating

Stage device for an exposure apparatus and semiconductor device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage device for an exposure apparatus and semiconductor device , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage device for an exposure apparatus and semiconductor device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2215278