Stage device for an exposure apparatus and semiconductor device

Details Stage device for an exposure apparatus and semiconductor device Stage device for an exposure apparatus and semiconductor device

1992-09-08

1993-11-09

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

25044211, 25045311, 378 34, 378208, H01J 3720

Patent

active

052605809

ABSTRACT:
A movable stage device, which has a stationary base, a movable stage and a linear motor, further includes a second linear motor which serves as a second driving device for imparting thrust to the movable stage and which is attached to the movable stage through the intermediation of an attachment plate Both ends of a row of second drive coils are supported above the floor by support plates, which are independent of the stationary base and directly support the row of second drive coils above the floor in such a manner as to provide high rigidity, thereby attaining an improvement in speed and accuracy of positioning and avoiding a waste of energy.

REFERENCES:
patent: 4810941 (1989-03-01), Ohishi et al.
patent: 4891526 (1990-01-01), Reeds
patent: 5073912 (1991-12-01), Kobayashi et al.

Affiliated with

Also associated with

Rating

Stage device for an exposure apparatus and semiconductor device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage device for an exposure apparatus and semiconductor device , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage device for an exposure apparatus and semiconductor device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1145176