Stage device for a vacuum chamber

Details Stage device for a vacuum chamber Stage device for a vacuum chamber

2011-08-02

2011-08-02

Wilson, Lee D (Department: 3727)

Work holders

With holder illuminating means

C269S058000, C254S122000, C254S126000

Reexamination Certificate

active

07988136

ABSTRACT:
The disclosure relates to a transfer stage for moving an object in a vacuum chamber in at least a plane of movement, including at least a first and a second rod each having a first and a second end, the first and second rod being connected one to the other with their first ends by a first hinge, the second end of the first rod being provided with a first hinged support and the second end of the second rod being provided with a second hinged support, the first and second hinged supports being roller supports and the first hinge being provided with a short stroke stage for the object. Particularly when using this transfer stage in lithography systems fast and reliable movements are possible.

REFERENCES:
patent: 5201501 (1993-04-01), Fassler
patent: 5771516 (1998-06-01), Huang
patent: 5975497 (1999-11-01), Few et al.
patent: 6279885 (2001-08-01), Leon, Jr.
patent: 6334605 (2002-01-01), Kikuchi
patent: 7168693 (2007-01-01), Sjuts et al.
patent: 2002/0084660 (2002-07-01), Webber
patent: 2008/0219805 (2008-09-01), Saunders

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