Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-10-10
1999-12-14
Metjahic, Safet
Photocopying
Projection printing and copying cameras
Step and repeat
355 75, G03B 2742, G03B 2762
Patent
active
060024658
ABSTRACT:
A stage device includes a table, a first stage movable in a first direction on the table, a first linear motor for driving the first stage, the first linear motor including a movable portion and a stationary portion, a second stage movable in a second direction with respect to the first stage, a second linear motor for driving the second stage, the second linear motor including a movable portion and a stationary portion and a third linear motor for driving the first stage, the third linear motor being disposed between the movable portion of the first linear motor and the first stage.
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Canon Kabushiki Kaisha
Metjahic Safet
Nguyen Hung Henry
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