Stage device, exposure apparatus, and device manufacturing...

Details Stage device, exposure apparatus, and device manufacturing... Stage device, exposure apparatus, and device manufacturing...

2007-05-29

2007-05-29

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C310S012060

Reexamination Certificate

active

11127292

ABSTRACT:
A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.

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patent: 2004-254489 (2004-09-01), None

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