Stage device and angle detecting device

Details Stage device and angle detecting device Stage device and angle detecting device

2006-04-11

2006-04-11

Chen, Jose V. (Department: 3637)

Horizontally supported planar surfaces

Power driven

C074S016000

Reexamination Certificate

active

07025005

ABSTRACT:
The present disclosure provides a stage device applicable to a semiconductor manufacturing apparatus. A stage device10comprises a Y-axis stage20and an X-axis stage40, the Y-axis stage20including a fixed component21and a movable component26movable along the Y-axis, the X-axis stage40including a fixed component41and a movable component43movable along the X-axis, wherein the fixed component41of the X-axis stage40is disposed on the movable component26of the Y-axis stage20, the Y-axis is designed as a scanning axis, while the X-axis is designed as a stepping axis, and a non-contact sealing device is arranged between the fixed component21and the movable component26of the Y-axis stage20.

REFERENCES:
patent: 4118042 (1978-10-01), Booth
patent: 4191385 (1980-03-01), Fox et al.
patent: 4425508 (1984-01-01), Lewis, Jr. et al.
patent: 4462580 (1984-07-01), Nielsen
patent: 5784925 (1998-07-01), Trost et al.
patent: 6252725 (2001-06-01), Tran et al.
patent: 6445440 (2002-09-01), Bisschops et al.
patent: 6499880 (2002-12-01), Tsuda et al.
patent: 6515288 (2003-02-01), Ryding et al.
patent: 6618122 (2003-09-01), Bisschops et al.
patent: 6735867 (2004-05-01), Tsuda et al.
patent: 2002-106563 (2002-04-01), None

Affiliated with

Also associated with

Rating

Stage device and angle detecting device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Stage device and angle detecting device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Stage device and angle detecting device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3532856