Stage device

Details Stage device Stage device

2007-08-21

2007-08-21

Guadalupe-McCall, Yaritza (Department: 2859)

Geometrical instruments

Miscellaneous

Light direction

C033S503000, C033S568000, C033S573000

Reexamination Certificate

active

11522400

ABSTRACT:
This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.

REFERENCES:
patent: 6817104 (2004-11-01), Kaneko et al.
patent: 2003/0213135 (2003-11-01), Kaneko et al.
patent: 2005/0198844 (2005-09-01), Lee et al.
patent: 2006/0064884 (2006-03-01), Seo
patent: 05-328702 (1993-12-01), None
patent: 8-313303 (1996-11-01), None
patent: 10-38549 (1998-02-01), None

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