Stage design for reflective optics

Details Stage design for reflective optics Stage design for reflective optics

2007-03-20

2007-03-20

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000

Reexamination Certificate

active

11031372

ABSTRACT:
A lithography apparatus including a reticle stage, a wafer stage, and an actuator. The reticle stage is operable to project an original image. A final image corresponding to the original image is formed on the wafer stage. The actuator is operable to actuate the reticle stage at a first acceleration and the wafer stage at a second acceleration. The first acceleration and the second acceleration are in colinear and opposite directions.

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