Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
Reexamination Certificate
2005-11-08
2005-11-08
Nghiem, Michael (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system
Dimensional determination
C355S075000
Reexamination Certificate
active
06963821
ABSTRACT:
A wafer stage countermass assembly generally includes a base supporting one or more stages and first and second countermasses. The first and second stages move in one or more degrees of freedom. The countermasses move in at least one degree of freedom and, under ideal conditions, move to counter the movement of the stages in operation and thus preserve the systems center of gravity to avoid unwanted body motion. However, under actual conditions the countermasses may under travel or over travel their ideal trajectory. To more closely track the ideal trajectory, a controller actuates trim motors to apply small forces to the countermasses to push them towards a reference position in the Y direction. A second embodiment also takes into account the X position the stage(s) to cancel torque.
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U.S. Appl. No. 10/325,916, filed on Dec. 23, 2002.
Binnard Michael
Novak W. Thomas
Ueta Toshio
Yuan Bausan
Greenblum & Bernstein P.L.C.
Nghiem Michael
Nikon Corporation
Sun Xiuqin
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