Stage control method, a stage control system, and a...

Details Stage control method, a stage control system, and a... Stage control method, a stage control system, and a...

2006-10-31

2006-10-31

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S077000, C318S135000

Reexamination Certificate

active

07130026

ABSTRACT:
A method of controlling a stage comprising:acquiring a first moving speed of the stage based upon position information from a laser interferometer for measuring a position of the stage; controlling the moving speed of the stage based upon the first speed; determining a second moving speed of the stage based upon the number of rotation of a motor for moving the stage; controlling the moving speed of the stage based upon the second moving speed; and acquiring a ratio of the second moving speed to the first moving speed based upon the first moving speed.

REFERENCES:
patent: 6744228 (2004-06-01), Cahill et al.
patent: 6859257 (2005-02-01), Korenaga
patent: 6-43939 (1994-02-01), None
patent: 9-73317 (1997-03-01), None
Translation of JP 6-043939 cited by Applicant.
Translation of JP 9-073317 cited by Applicant.
Honda, et al. “Theory and Practice on Servo-control” p. 32, (1995), published by Nikkan-Kogyo Shinbun.

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