Stage construction incorporating magnetically levitated movable

Details Stage construction incorporating magnetically levitated movable Stage construction incorporating magnetically levitated movable

1996-06-28

1999-07-20

Laballe, Clayton E.

Electrical generator or motor structure

Dynamoelectric

Rotary

310 12, 318135, H02K 4100, H02K 4102, H02K 709

Patent

active

059259566

ABSTRACT:
The stage construction of the present invention includes a fixed stage and a magnetically levitated movable stage which is driven in mutually perpendicular X, Y, and Z axis directions with respect to the fixed stage by magnetic action between itself and the fixed stage. The fixed stage includes a magnet and a closed plenum in which the magnet is sealed. The movable stage includes a magnetic material which is opposed to the magnet and which experiences an attractive or repulsive magnetic force with respect to the magnet.

REFERENCES:
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patent: 5196745 (1993-03-01), Trumper
patent: 5294854 (1994-03-01), Trumper
Patent Abstract of Japan "Alternating Current (AC) Magnetic Levitation Carrying Device" N. Kawada et al. Pub.No. 03272916A. Apr. 12, 1991.
Patent Abstract of Japan "Magnetic Levitation Type Vacuum Transportation Device" K.Miura et al. Pub. No. 02198920 A. Jul. 8, 1990.
Patent Abstract of Japan "Cooler for Floating Body of In-Vacuum Magnetic Floating Carrier" I. Moriyama et al. Pub. No. 04094322 A. Mar. 26, 1992.

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