Stage base, stage apparatus, exposure apparatus and device...

Details Stage base, stage apparatus, exposure apparatus and device... Stage base, stage apparatus, exposure apparatus and device...

2006-11-21

2006-11-21

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

07139065

ABSTRACT:
A stage base includes a plate which supports a stage. The plate has a first structure and a second structure, and the first and second structures are coupled. The stage base further includes a component which is arranged on the plate and has a cooling unit, a coolant channel arranged to extend through the plate into the component, and a seal member arranged between the first structure and the second structure so as to surround the coolant channel, an interior and an exterior of the seal member being fastened with a fastener.

REFERENCES:
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patent: 5440397 (1995-08-01), Ono et al.
patent: 5523843 (1996-06-01), Yamane et al.
patent: 6677167 (2004-01-01), Kanno et al.
patent: 6810298 (2004-10-01), Emoto
patent: 6866094 (2005-03-01), Cousineau et al.
patent: 2003/0058426 (2003-03-01), Watson et al.
patent: 2004/0130688 (2004-07-01), Emoto
patent: 2004/0145713 (2004-07-01), Ono
patent: 3145355 (2001-01-01), None
Patent Abstracts of Japan for Publication No. 11-023752, Jan. 29, 1999.

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