STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE...

Details STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE... STAGE APPARATUS WHICH SUPPORTS INTERFEROMETER, STAGE...

2005-03-15

2005-03-15

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000

Reexamination Certificate

active

06867849

ABSTRACT:
A stage apparatus includes a stage movable along at least one axis, a laser head for generating a laser beam, an optical unit which is mounted on the stage and splits the laser beam into reference and measurement beams, a mirror which is arranged outside the stage and reflects the measurement beam, and a detector which is arranged outside the stage and detects an interference beam of the reference and measurement beams.

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